Nanostep height measurement via spatial mode projection
نویسندگان
چکیده
منابع مشابه
Nanostep height measurement via spatial mode projection.
We demonstrate an optical scheme for measuring the thickness of thin nanolayers with the use of light beam's spatial modes. The novelty in our scheme is the projection of the beam reflected by the sample onto a properly tailored spatial mode. In the experiment described below, we are able to measure a step height smaller than 10 nm, i.e., one-eightieth (1/80) of the wavelength with a standard e...
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ژورنال
عنوان ژورنال: Optics Letters
سال: 2014
ISSN: 0146-9592,1539-4794
DOI: 10.1364/ol.39.000299